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Department of Physics

ΕΚ204

10ΕΚ204  Microelectronics

Course webpage: https://eclass.uoa.gr/courses/PHYS239

Course outline

Course content

  • Development and fields of application of microelectronics in the realization of integrated circuits of silicon or compound semiconductors.
  • Semiconductor materials (Si, GaAs).
  • Growth of Si and GaAs crystals.
  • Epitaxy. Lithography. Diffusion. Ion implantation and oxidation.
  • Etching processes and material deposition methods (metallization).
  • Structure of basic devices and physical design of integrated circuits: p-n diodes, bipolar transistor, MOSFET and CMOS transistors, realization of logic gates.